A new type zero leaking sealing technology magnetic fluid sealing 一种新型零泄漏磁性流体密封技术
Magnetic field numerical calculation of rectangular poled magnetic fluid sealing device 矩形齿磁流体密封装置的磁场计算
It also discusses the key technologies of robotic wafer handling system , including direct drive , magnetic fluid seals , magnetic coupling , trajectory planning , control technology , calibration and gripping 就直接驱动技术、磁性流体密封技术、磁力传动技术、硅片机器人轨迹规划与控制技术、校准技术以及夹持技术,对硅片机器人传输系统的关键技术进行了探讨。
On the basis of magnetic fluid sealing principle and micro - nano characteristics , this paper studied and designed a kind of new micro - nano magnetic fluid sealing structure that could satisfy more nicely the sealing requirements of stirring shaft of high speed pressured reaction axe with large length to diameter ratio , and by means of experiment the optimization de sign was carried out on its relevant parameters 该文根据磁性流体密封原理和微纳米特性,研究设计了一种能更好地满足高速大长径比压力反应釜搅拌轴密封要求的新型微纳米磁性流体密封结构,并通过实验对其相关参数进行了优化设计。